DEVICE FOR FEEDING HIGH-FREQUENCY POWER AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
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United States of America Patent
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Mar 9, 2017
app pub date -
Jul 26, 2016
filing date -
Sep 3, 2015
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Abstract
The present disclosure relates to a device for feeding high-frequency power and a substrate processing apparatus having the same, and more particularly, to a device for feeding high-frequency power, in which a matcher is integrated with a power divider and a substrate processing apparatus having the same. The device for feeding high-frequency power includes an input unit into which high-frequency power is inputted from a high-frequency power source, a plurality of output units in which the high-frequency power inputted into the input unit is divided and outputted, a plurality of variable capacitors connected between a division point at which the high-frequency power is divided and the plurality of output units, respectively, and a second variable capacitor connected between the input unit and the division point.
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