ULTRASONIC INSPECTION APPARATUS, ULTRASONIC INSPECTION SYSTEM, AND ULTRASONIC INSPECTION METHOD
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United States of America Patent
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Issued Date -
Mar 9, 2017
app pub date -
Sep 2, 2016
filing date -
Sep 4, 2015
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Abstract
To minimize contact between water and a work piece that should avoid water and obtain good images in ultrasonic inspection, an ultrasonic probe that irradiates a work piece with an ultrasonic wave and receives reflected wave thereof, an X and Y-axis driving devices that allow the ultrasonic probe 21 to scan the work piece in a horizontal direction, a Z-axis driving device that moves up and down the ultrasonic probe with respect to the work piece, a water supply part provided in the ultrasonic probe and supplying water in a predetermined amount between the probe tip end portion and the work piece, and a water suction part provided in the ultrasonic probe and suctioning the water after water supply by the water is supplied are provided.
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