Device for Monitoring the Alignment of a Laser Beam, and EUV Radiation Generating Apparatus having such a Device
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Nov 10, 2016
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May 13, 2014
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This disclosure relates to a device for monitoring the alignment of a laser beam, comprising: a detector having an opening for passage of the laser beam, at least two temperature sensors which are mounted on the detector, and a temperature monitoring device which is connected to the at least two temperature sensors, for monitoring the alignment of the laser beam relative to the opening. The at least two temperature sensors have a temperature-dependent resistance which either increases as the temperature increases or decreases as the temperature increases, and the at least two temperature sensors are connected in series with the temperature monitoring device. This disclosure relates also to an EUV radiation generating apparatus which has at least one device as described above for monitoring the alignment of a laser beam.
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