Plasma-enhanced atomic layer deposition system with rotary reactor tube
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United States of America Patent
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Issued Date -
Mar 2, 2017
app pub date -
Aug 23, 2016
filing date -
Aug 31, 2015
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Abstract
Systems and methods for coating particles using PE-ALD and a rotary reactor tube are disclosed. The reactor tube is part of a reactor tube assembly that can rotate and move axially so that it is operably disposed relative to a plasma-generating device. The plasma-generating device has an active state that generates a plasma from a precursor gas and an inactive state that passes the precursor gas without forming a plasma. The reactor tube resides in a chamber that has an open position for accessing the reactor tube and a closed position that supports a vacuum. An output end of the plasma-generating device resides immediately adjacent or within an input section of the reactor tube. This configuration avoids the need for an active portion of the plasma-generating device residing adjacent an outer surface of the reactor tube.
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