Sample holder and sample holder set
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United States of America Patent
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Jan 9, 2018
Issued Date -
N/A
app pub date -
Jun 27, 2016
filing date -
Sep 1, 2015
priority date (Note) -
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Abstract
Disclosed herein is a sample holder which holds a sample such that a surface is exposed and can be mounted in each of multiple measurement devices that perform measurement based on different measurement principles so that properties of the sample can be measured by each of the measurement devices. The sample holder includes: a main body that surrounds the sample; alignment marks that are arranged at each of two or more different positions in a surface of the main body and can be detected by the measurement devices; and a sample-retaining portion that is disposed within the main body and retains the sample such that a height difference between a mark surface of the alignment mark and the surface of the sample is set to a predetermined value.
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