DEVICE WITH SEPARATION LIMITING STANDOFF
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United States of America Patent
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Issued Date -
Mar 2, 2017
app pub date -
Aug 10, 2016
filing date -
Aug 26, 2015
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Abstract
An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits the gap to about 66% of the initial distance.
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