MEMS REED SWITCH DEVICE
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United States of America Patent
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Issued Date -
Mar 2, 2017
app pub date -
Aug 15, 2016
filing date -
Aug 26, 2015
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Abstract
A MEMS device, having two flexible, permeable members which are manufactured to have sub-millimeter dimensions using MEMS fabrication procedures. The flexible, permeable members may form a reed switch, which closes an electrical connection in the presence of a magnetic field, and opens the connection otherwise. The MEMS reed switch device may be made using a three-wafer architecture of a lid wafer, a device wafer, and a lower, supporting wafer.
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