Coating composition for use with an overcoated photoresist

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United States of America Patent

PATENT NO 10788751
APP PUB NO 20170059991A1
SERIAL NO

15253005

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Abstract

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Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a crosslinker component that comprises a structure of the following Formula (I):

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grandbois, Matthew Marlborough, US 2 0
Jang, Min Kyung Chungcheongnam-Do, KR 6 12
Kim, Myung Yeol Chungcheongnam-Do, KR 4 3
Lee, Jung-June Chungcheongnam-Do, KR 13 20
Ryu, Eui Hyun Chungcheongnam-Do, KR 12 23
Sim, Jae Hwan Chungcheongnam-Do, KR 15 28

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