Optical position-measuring device having incremental detector and absolute detector disposed in a common detection plane at a defined perpendicular distance from a scanning grating
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United States of America Patent
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Jan 9, 2018
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app pub date -
Aug 10, 2016
filing date -
Aug 26, 2015
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Abstract
An optical position-measuring device for absolute position determination includes a material measure extending along a measurement direction and including an incremental graduation and an absolute code. A scanning unit movable relative to the material measure has a light source, a scanning grating for optically scanning the incremental graduation and a detector device. The detector device includes an incremental detector for generating incremental signals from the optical scanning of the incremental graduation and an absolute detector for generating absolute signals from optical scanning of the absolute code. A common detection plane is located at a defined perpendicular distance from the scanning grating and/or a periodicity of a fringe pattern on the incremental detector is selected such that, in the event of scattering contamination in a region of the material measure and/or the scanning grating, amplitudes of the incremental signals and the absolute signals drop off equally.
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