COMBINATION ELECTRODE FOR DRIVE, DRIVE DETECTION, CORIOLIS DETECTION, AND QUADRATURE COMPENSATION
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United States of America Patent
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Issued Date -
Mar 2, 2017
app pub date -
Aug 24, 2016
filing date -
Aug 28, 2015
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Abstract
A method for operating a rotational rate sensor having a substrate and at least one structure movable relative thereto, at least one first and at least one fourth electrodes fastened to the structure, and at least one second, at least one third, at least one fifth, and at least one sixth electrodes fixed to the substrate, the first electrode being situated at least partially between second and third electrodes, the fourth electrode being situated at least partially between fifth and sixth electrodes, in each case in a rest position of the structure and along a direction essentially parallel to a first axis, the structure being excited, in a first task, from a rest position of the structure to an oscillation having a movement component essentially parallel to a second axis running perpendicular to the first axis during at least one first time interval within at least one oscillation period.
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