SUBSTRATE PRE-TREATMENT FOR CONSISTENT GRAPHENE GROWTH BY CHEMICAL DEPOSITION
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United States of America Patent
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Issued Date -
Mar 2, 2017
app pub date -
Apr 24, 2015
filing date -
May 5, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to a process for preparing graphene, comprising (i) providing in a chemical deposition chamber a substrate which has a surface S1, (ii) subjecting the substrate to a thermal pre-treatment while feeding at least one gaseous or supercritical oxidant into the chemical deposition chamber so as to bring the surface S1 into contact with the at least one gaseous or supercritical oxidant and obtain a pre-treated surface S2, (iii) preparing graphene on the pre-treated surface S2 by chemical deposition.
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| EP | A1 | EP2942326 | May 05, 2014 |
| CN | A | CN106232521 | Apr 24, 2015 |
| KR | A | KR20170009889 | Apr 24, 2015 |
| WO | A1 | WO2015169624 | Apr 24, 2015 |
| JP | A | JP2017521339 | Apr 24, 2015 |
| EP | A1 | EP3152159 | Apr 24, 2015 |
| TW | A | TW201546339 | Apr 30, 2015 |
International Classification(s)
- 2015 Application Filing Year
- C23C Class
- 3009 Applications Filed
- 2118 Patents Issued To-Date
- 70.39 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- C23C Class
- 27.20 % this patent is cited more than
- 8 Age