Measuring method for atomic force microscope
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United States of America Patent
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Jan 29, 2019
Grant Date -
Feb 23, 2017
app pub date -
Aug 16, 2016
filing date -
Aug 17, 2015
priority date (Note) -
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Abstract
Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.
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