METHOD FOR INSTALLING A GAS DIFFUSION DEVICE
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United States of America Patent
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Feb 23, 2017
app pub date -
Apr 29, 2015
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Apr 30, 2014
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Abstract
The present invention relates to a method of implanting impurities in a part. The method is remarkable in that the part is a gas diffusion device of the showerhead type in the form of a hollow body 1 having a gas admission orifice 2 and an ejection surface 3 provided with a plurality of holes, and the implanting takes place in the ejection surface.
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