Method and device for plasma treatment of substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10707059
APP PUB NO 20170047203A1
SERIAL NO

15306132

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Abstract

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A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

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Patent Owner(s)

Patent OwnerAddress
EV GROUP E THALLNER GMBHDI ERICH THALLNER STRASSE 1 ST FLORIAN AM INN A-4782

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anzengruber, Roman Riedau, AT 1 2
Bernauer, Johann St. Florian am Inn, AT 7 41
Flotgen, Christoph St. Florian am Inn, AT 8 12
Glinsner, Thomas St. Florian am Inn, AT 12 21
Kriebisch, Uwe St. Florian am Inn, AT 1 2
Nones, Alexander Obernberg am Inn, AT 1 2
Plach, Thomas Stadl-Paura, AT 37 106
Schmid, Florian Ried im Innkreis, AT 30 47
Wagenleitner, Thomas Aurolzmunster, AT 51 647
Wieser, Thomas Kirchdorf am Inn, DE 5 35

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