Plasma Diffuser
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United States of America Patent
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Issued Date -
Feb 16, 2017
app pub date -
Apr 22, 2015
filing date -
Apr 22, 2014
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Abstract
The present invention concerns a method for at least partially preventing discolouration of a substrate by a plasma coating process, by diffusing a plasma prior to and/or during depositing of said plasma on said substrate to form a coating. The present invention also concerns a plasma coating apparatus comprising a plasma diffuser for homogenizing a plasma density nearby a substrate to be coated.
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