MICROELECTRONIC MODULE, MODULE ARRAY, AND METHOD FOR INFLUENCING A FLOW
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United States of America Patent
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Aug 10, 2016
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Aug 12, 2015
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Abstract
A microelectronic module for influencing a flow of a fluid is provided. The module comprises at least one voltage converter for converting a provided first voltage into a higher, lower, or identical second voltage. The module also comprises at least one active flow-influencing element for influencing the direction and/or the speed of a fluid which is flowing around and/or over the flow-influencing element. At least the voltage converter and the active flow-influencing element are disposed on a thin-film, planar substrate. The influencing of the direction and/or the speed of the fluid is dependent on a hydrodynamic acceleration as a function of the second voltage provided by the voltage converter at the flow-influencing element.
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