Solid precursor-based delivery of fluid utilizing controlled solids morphology

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United States of America Patent

PATENT NO 10895010
APP PUB NO 20170037511A1
SERIAL NO

15334040

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Abstract

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Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

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Patent Owner(s)

Patent OwnerAddress
MORGAN STANLEY SENIOR FUNDING INC1300 THAMES STREET 4TH FLOOR BALTIMORE MD 21231

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arno, Jose I Brookfield, US 63 1996
Battle, Scott Cedar Park, US 7 1328
Cleary, John M New Fairfield, US 10 1123
Gregg, John N Marble Falls, US 47 3616
Hendrix, Bryan C Danbury, US 122 3166
Naito, Donn Marble Falls, US 6 1304
Wodjenski, Michael J New Milford, US 33 1403
Xu, Chongying New Milford, US 153 7154

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