Branched siloxanes and methods for synthesis

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United States of America Patent

PATENT NO 9802968
SERIAL NO

15232138

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Abstract

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The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.

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BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM210 WEST 7TH STREET AUSTIN TX 78701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jacobsson, Michael B Austin, US 3 7
Ogawa, Tsuyoshi Austin, US 122 1163
Willson, C Grant Austin, US 38 1008

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