METHOD OF MANUFACTURING MULTI-LAYERED FILM, AND MULTI-LAYERED FILM
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United States of America Patent
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Jan 19, 2017
app pub date -
Mar 3, 2015
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Mar 10, 2014
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Abstract
A method of manufacturing a multi-layered film includes: forming an electroconductive layer on a substrate; forming a seed layer including an oxidative product having a perovskite structure so as to coat the electroconductive layer by a sputtering method; and forming a dielectric layer so as to coat the seed layer.
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