THIN FILM DEPOSITING APPARATUS AND THE THIN FILM DEPOSITING METHOD USING THE SAME

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United States of America Patent

SERIAL NO

15277977

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Abstract

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A thin film depositing apparatus and a thin film deposition method using the apparatus. The thin film depositing apparatus includes a chamber configured to have a substrate mounted therein, an ejection unit configured to move in the chamber and to eject a deposition vapor to the substrate, and a source supply unit configured to supply a source of the deposition vapor to the ejection unit.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

International Classification(s)

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  • 2016 Application Filing Year
  • C23C Class
  • 3247 Applications Filed
  • 2111 Patents Issued To-Date
  • 65.02 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
An, Mi-Ra Yongin-si, KR 10 13
Hong, Sang-Hyuk Yongin-si, KR 6 7
Huh, Myung-Soo Yongin-si, KR 75 282
Jo, Cheol-Rae Yongin-si, KR 12 32
Jung, Suk-Won Yongin-si, KR 61 252
Kim, Sun-Ho Yongin-si, KR 30 210
Lee, Yong-Suk Yongin-si, KR 39 598
Yi, Jeong-Ho Yongin-si, KR 18 56

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4219241045322915232201 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0501001502002503003504004505005506006507007508008509009501000

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