THIN FILM DEPOSITING APPARATUS AND THE THIN FILM DEPOSITING METHOD USING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Sep 27, 2016
filing date -
Dec 28, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A thin film depositing apparatus and a thin film deposition method using the apparatus. The thin film depositing apparatus includes a chamber configured to have a substrate mounted therein, an ejection unit configured to move in the chamber and to eject a deposition vapor to the substrate, and a source supply unit configured to supply a source of the deposition vapor to the ejection unit.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SAMSUNG DISPLAY CO LTD | GYEONGGI DO SOUTH KOREA GYEONGGI-DO |
International Classification(s)

- 2016 Application Filing Year
- C23C Class
- 3247 Applications Filed
- 2111 Patents Issued To-Date
- 65.02 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
An, Mi-Ra | Yongin-si, KR | 10 | 13 |
# of filed Patents : 10 Total Citations : 13 | |||
Hong, Sang-Hyuk | Yongin-si, KR | 6 | 7 |
# of filed Patents : 6 Total Citations : 7 | |||
Huh, Myung-Soo | Yongin-si, KR | 75 | 282 |
# of filed Patents : 75 Total Citations : 282 | |||
Jo, Cheol-Rae | Yongin-si, KR | 12 | 32 |
# of filed Patents : 12 Total Citations : 32 | |||
Jung, Suk-Won | Yongin-si, KR | 61 | 252 |
# of filed Patents : 61 Total Citations : 252 | |||
Kim, Sun-Ho | Yongin-si, KR | 30 | 210 |
# of filed Patents : 30 Total Citations : 210 | |||
Lee, Yong-Suk | Yongin-si, KR | 39 | 598 |
# of filed Patents : 39 Total Citations : 598 | |||
Yi, Jeong-Ho | Yongin-si, KR | 18 | 56 |
# of filed Patents : 18 Total Citations : 56 |
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Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 8 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 19, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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