OSCILLATION DEVICE AND PHYSICAL QUANTITY SENSOR
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United States of America Patent
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Issued Date -
Jan 12, 2017
app pub date -
Jul 5, 2016
filing date -
Jul 7, 2015
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Abstract
An oscillation device includes a vibrator made of a quartz substrate, a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator, a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate, a cap layer disposed on an opposite side of the vibration substrate from the support substrate and jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint. At least one pad electrically connected to the vibration substrate is formed on the cap layer. At least one conductor pattern opposed to the pad is formed on a vibration substrate side surface of the cap layer and is electrically connected to the pad.
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