Methods of Optimizing Ion Transmission Between Differentially Pumped Vacuum Chambers
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United States of America Patent
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Jan 12, 2017
app pub date -
Jul 6, 2015
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Jul 6, 2015
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Apparatus and methods for optimizing the transmission of ions between two differentially pumped vacuum chambers. Ion transmission from the higher pressure vacuum chamber into the lower pressure vacuum chamber is maximized while gas conductance between the chambers is minimized. The conventional single hole circular aperture between adjacent vacuum chambers is replaced with an interface comprising a plurality of smaller apertures configured according to a calculated hole pattern. The individual apertures of the new interface may preferably be arranged in a circular fashion, providing both adequate ion transmission and lower gas conductance. Another embodiment of the invention comprises a surface having a single aperture whose shape comprises a contiguous collection of individual aperture shapes.
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