Method and System for Providing an Improved Wafer Transport System
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United States of America Patent
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Issued Date -
Jan 12, 2017
app pub date -
Jul 10, 2015
filing date -
Jul 10, 2015
priority date (Note) -
Abandoned
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Abstract
A method of controlling a delivery to a working station comprises processing first carrier of wafers at a working station for a processing step, checking location of a second carrier at a predetermined checking time to obtain a checking result. The predetermined checking time is a predetermined period of time ahead of an end of the processing step. The method further comprises removing the first carrier from the working station after the processing step is completed, delivering a second carrier of wafers to the working station and processing the second carrier of wafers at the working station.
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