Conductive polymer composition, coated article, and patterning process

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United States of America Patent

PATENT NO 9897917
SERIAL NO

15182036

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Abstract

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The present invention provides a conductive polymer composition including: (A) a π-conjugated conductive polymer having at least one repeating unit shown by the following general formulae (1-1), (1-2), and (1-3); and (B) a dopant polymer which contains a repeating unit “a” shown by the following general formula (2) and has a weight-average molecular weight in a range of 1,000 to 500,000. The inventive conductive polymer composition has excellent antistatic performance in electron beam-resist drawing as well as good applicability onto a resist and peelability with H2O and an alkaline solution, thereby being suitably used for electron beam lithography.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDTOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatakeyama, Jun Jyoetsu, JP 692 7607
Nagasawa, Takayuki Jyoetsu, JP 55 247

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