Integrated lens-array-on-substrate for optical coupling system and fabrication method thereof
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United States of America Patent
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Sep 18, 2018
Grant Date -
Jan 12, 2017
app pub date -
Sep 22, 2016
filing date -
Jul 23, 2014
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Abstract
An imprinting method for forming an integrated optical coupling device on wafer level may include: providing a substrate, with a reflection coating disposed thereon; providing an imprinting mold, with void regions shaped according to a designed lens profile; forming a molding material on the substrate; pressing the imprinting mold on the molding material on the substrate; curing the molding material into a cured molding material; removing the imprinting mold; depositing an anti-reflection film on the cured molding material; and dicing to form an integrated optical coupling device.
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