Ion implantation for modification of thin film coatings on glass

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United States of America Patent

PATENT NO 9850570
SERIAL NO

15203747

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Abstract

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The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low E enhancement, and other similar materials. In further aspects, ion implantation is used to create other desirable film properties such anti-microbial and corrosion resistance.

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Patent Owner(s)

Patent OwnerAddress
INTEVAC INC3560 BASSETT STREET SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adibi, Babak Los Altos, US 37 945
Bluck, Terry Santa Clara, US 86 2628

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