Wafer boat and manufacturing method of the same
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United States of America Patent
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Jul 17, 2018
Grant Date -
Dec 29, 2016
app pub date -
Jun 15, 2016
filing date -
Jun 29, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A wafer boat supporting a silicon wafer to be processed provides a sufficient anchor effect between a deposit film and a SiC coating film formed on a base material, and suppresses generation of particles due to peeling off of the deposit film. The vertical wafer boat includes a plurality of columns, being made of SiC-based material having a SiC coating film on a surface thereof, which contains shelf plate portions for supporting wafers, and a top plate and a bottom plate for fixing upper and lower ends of the columns, wherein a supporting plane which is in contact with an outer peripheral portion of the wafer is provided on an upper surface of the shelf plate portion, and a surface roughness Ra of a lower surface of the shelf plate increases toward a front side of the shelf plate portion from a rear side.
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