DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
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United States of America Patent
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Issued Date -
Dec 29, 2016
app pub date -
Jun 26, 2015
filing date -
Jun 26, 2015
priority date (Note) -
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Abstract
An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of the chamber so as to be movable between a closed position in which the lid seals the upper opening, and an open position in which the lid uncovers the upper opening and is displaced laterally therefrom. The chamber is openable separately from the lid so as to permit a wafer shaped article to be introduced into the chamber in a direction perpendicular to the axis of rotation.
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