EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
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United States of America Patent
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app pub date -
Sep 6, 2016
filing date -
Apr 28, 2014
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Abandoned
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Abstract
An extreme ultraviolet light generation apparatus may include: a target supply device configured to supply targets from a nozzle; a first illumination device configured to output light having a first characteristic to illuminate targets outputted from the nozzle; a second illumination device configured to output light having a second characteristic different from the first characteristic to illuminate the targets outputted from the nozzle; a first imaging device configured to photograph light reflected off the targets illuminated with the light having the first characteristic; and a second imaging device configured to photograph light reflected off the targets illuminated with the light having the second characteristic.
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