Particle Beam Heating to Identify Defects
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United States of America Patent
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app pub date -
Mar 19, 2016
filing date -
Mar 19, 2015
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Abstract
A charged particle beam, such as an electron beam or an ion beam, scans a device while a signal is applied to the device. As the particle beam scans, it locally heats the device, altering the local electrical characteristics of the device. The change in electrical characteristic is detected to and correlated to the position of the electron beam to localize a defect.
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