TESTING DEVICE FOR ELECTRICALLY TESTING AN ELECTRICAL TEST SPECIMEN
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United States of America Patent
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Apr 15, 2014
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Jun 29, 2013
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Abstract
A testing device for electrically testing an electrical test specimen, in particular a wafer, the testing device having a test head in which at least one testing contact is mounted for electrically contacting a test specimen. At least one outlet opening for discharging a gas, in particular a protective gas, into a contact region, is provided in a wall of the test head.
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