INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
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United States of America Patent
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Issued Date -
Dec 22, 2016
app pub date -
Jun 17, 2015
filing date -
Jun 17, 2015
priority date (Note) -
Abandoned
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Abstract
A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
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