Table device and conveyance device
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United States of America Patent
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-
Apr 3, 2018
Issued Date -
N/A
app pub date -
Dec 18, 2013
filing date -
Jul 2, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.
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