SENSOR AND MANUFACTURING METHOD OF SENSOR
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United States of America Patent
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Issued Date -
Dec 15, 2016
app pub date -
Sep 4, 2015
filing date -
Jun 10, 2015
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Abstract
A manufacturing method of a sensor including the following steps and a sensor are provided. An active device and a first insulation layer covering the active device are formed on a substrate. The first insulation layer has a first opening exposing a portion of the active device. A blanket conductive layer is formed on the first insulation layer using a conductive material. The blanket conductive layer is connected to the active device through the first opening. A photoelectric conversion material layer is formed on the blanket conductive layer. A first photoresist pattern formed on photoelectric conversion material layer is served as a mask for patterning the photoelectric conversion material layer into a photoelectric conversion unit. The blanket conductive layer is patterned to form a first electrode disposed in the first opening and electrically connecting the photoelectric conversion unit to the active device.
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