METHOD FOR MANUFACTURING VOICE COIL
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United States of America Patent
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Issued Date -
Dec 15, 2016
app pub date -
Jul 9, 2015
filing date -
Jun 9, 2015
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Abstract
Provided is a method for manufacturing a voice coil, and more particularly, to a voice coil manufacturing method for forming a coil pattern on a wafer level package. The method for manufacturing a voice coil includes forming a first passivation layer on an upper surface of a wafer, forming a first coil directly on the first passivation layer, forming a second passivation layer on the first passivation layer and on an upper surface of the first coil, forming a third passivation layer on an upper surface of the second passivation layer, forming a second coil directly on the third passivation layer, and forming an external connection terminal on a portion of the second coil.
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