Cyclopentadienyl titanium alkoxides with ozone activated ligands for ALD of TiO2

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United States of America Patent

PATENT NO 10870921
APP PUB NO 20160362790A1
SERIAL NO

15107170

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Abstract

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An organotitanium compound selected from the group consisting of:

    (i) organotitanium compounds of Formulae (I):

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Patent Owner(s)

Patent OwnerAddress
MORGAN STANLEY SENIOR FUNDING INC1300 THAMES STREET 4TH FLOOR BALTIMORE MD 21231

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cameron, Thomas M Newtown, US 58 1153
Hunks, William Danbury, US 30 1279

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