MEASUREMENT APPARATUS, SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Dec 8, 2016
app pub date -
May 31, 2016
filing date -
May 31, 2016
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Abstract
The present invention provides a measurement apparatus for measuring a shape of an object using pattern light, comprising a light source having a structure including a reflecting portion for reflecting light, a mask including a pattern region which includes reflecting regions for reflecting light, and configured to generate the pattern light, an optical system arranged between the light source and the mask, wherein the light source, the optical system, and the mask are arranged so that light emitted from the light source is incident on the reflecting region via the optical system, is reflected by the reflecting region to return to the light source via the optical system, and then is reflected by the reflecting portion of the light source to enter the transmitting region via the optical system.
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