MEMS RESONATOR WITH HIGH QUALITY FACTOR
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United States of America Patent
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Dec 1, 2016
app pub date -
May 27, 2015
filing date -
May 27, 2015
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Abstract
A symmetrical MEMS resonator is disclosed with a high quality factor. The MEMS resonator includes a silicon layer with a top surface and bottom surface opposite the top surface. A pair of first metal layers is provided above the top surface of the silicon layer and a corresponding pair of second metal layers is symmetrically provided below the second surface of the silicon layer relative to the pair of first metal layers. Furthermore, a first piezoelectric layer is disposed between the pair of first metal layers and a second piezoelectric layer is disposed between the pair of second metal layers.
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