PROCESS FOR MANUFACTURING INTEGRATED ELECTRONIC DEVICES, IN PARTICULAR CMOS DEVICES USING A BORDERLESS CONTACT TECHNIQUE

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United States of America Patent

APP PUB NO 20160351495A1
SERIAL NO

14966435

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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For manufacturing an integrated electronic device, a protection layer, of a first material, is formed over a body having a non-planar surface; a first dielectric layer, of a second material, is formed over the protection layer, the second material being selectively etchable with respect to the first material; an intermediate layer, of a third material, is formed over the first dielectric layer, the third material being selectively etchable with respect to the second material; a second dielectric layer, of a fourth material, is formed over the intermediate layer, the fourth material being selectively etchable with respect to the third material; vias are formed through the second dielectric layer, the intermediate layer, the first dielectric layer, and the protection layer; and electrical contacts, of conductive material, are formed in the vias.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LVIA C OLIVETTI 2 AGRATE BRIANZA 20864

International Classification(s)

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  • 2015 Application Filing Year
  • H01L Class
  • 25498 Applications Filed
  • 22451 Patents Issued To-Date
  • 88.06 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20152016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MARIANI, Simone Dario Vedano al Lambro, IT 16 37
PAOLILLO, Sara Milano, IT 1 4
TAGLIABUE, Giovanni Monza, IT 7 157

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Patent Citation Ranking

  • 4 Citation Count
  • H01L Class
  • 13.47 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1792827316886303131891006776342711301 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050010001500200025003000350040004500500055006000650070007500800085009000

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