Processing chamber, combination of processing chamber and loadlock, and system for processing substrates

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United States of America Patent

PATENT NO 10685814
APP PUB NO 20160351429A1
SERIAL NO

14952230

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Abstract

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A system for processing substrates having an atmospheric front end and a vacuum main frame, primary processing chambers attached to the main frame, a loadlock positioned between the front end and the main frame, and at least one secondary processing chamber attached to the loadlock.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED MICRO-FABRICATION EQUIPMENT INC CHINA188 TAIHUA ROAD JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG NEW AREA SHANGHAI 201201 201201

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ni, Tuqiang Shanghai, CN 77 1517
Tao, Heng Shanghai, CN 15 86
Wang, Qian Shanghai, CN 584 3513

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