Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
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United States of America Patent
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Dec 18, 2018
Grant Date -
Nov 24, 2016
app pub date -
Aug 3, 2016
filing date -
Mar 11, 2003
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Abstract
The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.
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