Vapour deposition method for preparing amorphous lithium-containing compounds
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United States of America Patent
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Dec 15, 2020
Grant Date -
Nov 24, 2016
app pub date -
Jan 7, 2015
filing date -
Jan 8, 2014
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Abstract
A vapour deposition method for preparing an amorphous lithium-containing oxide or oxynitride compound not containing phosphorous comprises providing a vapour source of each component element of the compound, including at least a source of lithium, a source of oxygen, a source of nitrogen in the case of an oxynitride compound, and a source or sources of one or more glass-forming elements; heating a substrate to substantially 180° C. or above; and co-depositing the component elements from the vapour sources onto the heated substrate wherein the component elements react on the substrate to form the amorphous compound.
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