Nonuniform corrugated diaphragm for MEMS tuners and actuators
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United States of America Patent
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Mar 13, 2018
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N/A
app pub date -
Apr 14, 2016
filing date -
Apr 14, 2015
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Abstract
A cavity resonator tuning diaphragm comprising a plurality of inner corrugations, the plurality of inner corrugations having a first depth. An outer corrugation located between the plurality of inner corrugations and a perimeter of the diaphragm is also included, the outer corrugation having a second depth greater than the first depth. The addition of the outer deep corrugation provides increased thermal stability and reduced required actuation voltage.
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