METHOD AND APPARATUS FOR FORMING OXIDE THIN FILM
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United States of America Patent
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N/A
Issued Date -
Nov 17, 2016
app pub date -
Dec 11, 2014
filing date -
Dec 18, 2013
priority date (Note) -
Published
status (Latency Note)
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Abstract
Disclosed is a method for forming an oxide thin film on a solid substrate, the method including the steps of placing a solid substrate s a in a reaction container 1, maintaining the solid substrate at a temperature of higher than 0° C. and 150° C. or lower, and filling the reaction container with an organometallic gas containing tetrakis(ethylmethylamino)hafnium or tetrakis(ethylmethylamino)zirconium; discharging the organometallic gas from the reaction container or filling the reaction container with an inert gas; treating a gas containing oxygen and water vapor with plasma, to thereby generate a plasma gas containing excited oxygen and water vapor, and feeding the plasma gas into the reaction container; and discharging the plasma gas from the reaction container or filling the reaction container with an inert gas; and repeating the series of steps.
First Claim
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Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
JP | B2 | JP6484892 | Dec 11, 2014 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PUBLISHED GRANTED PATENT (SECOND LEVEL) | 酸化物薄膜の形成方法および装置 | Mar 20, 2019 | |||
KR | A | KR20160125947 | Dec 11, 2014 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
UNEXAMINED PATENT APPLICATION | 산화물 박막의 형성 방법 및 장치 | Nov 01, 2016 | |||
WO | A1 | WO2015093389 | Dec 11, 2014 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
INTERNATIONAL APPLICATION PUBLISHED WITH INTERNATIONAL SEARCH REPORT | 酸化物薄膜の形成方法および装置 | Jun 25, 2015 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
YAMAGATA UNIVERSITY | 1-4-12 KOJIRAKAWA-MACHI YAMAGATA-SHI YAMAGATA 990-8560 |
International Classification(s)

- 2014 Application Filing Year
- H01J Class
- 2291 Applications Filed
- 1924 Patents Issued To-Date
- 83.99 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
HIROSE, Fumihiko | Yamagata, JP | 16 | 88 |
# of filed Patents : 16 Total Citations : 88 | |||
KANOMATA, Kensaku | Yamagata, JP | 2 | 4 |
# of filed Patents : 2 Total Citations : 4 |
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Patent Citation Ranking
- 4 Citation Count
- H01J Class
- 20.76 % this patent is cited more than
- 9 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 17, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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