AC power connector, sputtering apparatus and method therefor

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United States of America Patent

PATENT NO 10818475
APP PUB NO 20160336151A1
SERIAL NO

15105894

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Abstract

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An AC power connector for connecting an AC power supply with a device is provided. The AC power connector includes at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bender, Marcus Hanau, DE 21 142
Hellmich, Anke Kahl, DE 12 65
Keller, Stefan Mainaschaff, DE 94 452
Schnappenberger, Frank Johannesberg, DE 16 22

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