ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20160336101A1
SERIAL NO

14916725

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONTOKYO
CKD CORPORATION250 OUJI 2-CHOME KOMAKI-SHI AICHI 4858551

International Classification(s)

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  • 2014 Application Filing Year
  • H02K Class
  • 2148 Applications Filed
  • 1788 Patents Issued To-Date
  • 83.25 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ITO, Akihiro Aichi, JP 139 1028
KOUKETSU, Masayuki Aichi, JP 39 289
MORIMOTO, Shigeru Kumagaya-shi, JP 50 498
TANAKA, Koji Kumagaya-shi, JP 376 3502
YOSHIMOTO, Hiromitsu Saitama-shi, JP 21 623

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Patent Citation Ranking

  • 1 Citation Count
  • H02K Class
  • 16.70 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges171723992271101 - 1011 - 2021 - 3031 - 4051 - 6081 - 90050100150200250300350400450500550600650700750800

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