ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Nov 17, 2016
app pub date -
Sep 4, 2014
filing date -
Sep 4, 2013
priority date (Note) -
Published
status (Latency Note)
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Importance

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Non-US Coverage
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Abstract
Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
NIKON CORPORATION | TOKYO | |
CKD CORPORATION | 250 OUJI 2-CHOME KOMAKI-SHI AICHI 4858551 |
International Classification(s)

- 2014 Application Filing Year
- H02K Class
- 2148 Applications Filed
- 1788 Patents Issued To-Date
- 83.25 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
ITO, Akihiro | Aichi, JP | 139 | 1028 |
# of filed Patents : 139 Total Citations : 1028 | |||
KOUKETSU, Masayuki | Aichi, JP | 39 | 289 |
# of filed Patents : 39 Total Citations : 289 | |||
MORIMOTO, Shigeru | Kumagaya-shi, JP | 50 | 498 |
# of filed Patents : 50 Total Citations : 498 | |||
TANAKA, Koji | Kumagaya-shi, JP | 376 | 3502 |
# of filed Patents : 376 Total Citations : 3502 | |||
YOSHIMOTO, Hiromitsu | Saitama-shi, JP | 21 | 623 |
# of filed Patents : 21 Total Citations : 623 |
Cited Art Landscape
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Patent Citation Ranking
- 1 Citation Count
- H02K Class
- 16.70 % this patent is cited more than
- 9 Age
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- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 17, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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