SUBASSEMBLY OF AN OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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United States of America Patent
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app pub date -
Jul 25, 2016
filing date -
Feb 21, 2014
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Abandoned
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Abstract
The disclosure provides a subassembly of an optical system, in particular in a microlithographic projection exposure apparatus, with an element and at least one temperature-controlling device for controlling the temperature of this element. The temperature-controlling device has a cooling medium in a closed circuit with at least one tube-like portion. The cooling medium is transportable away from the element or to the element in the tube-like portion while performing a two-phase transition. A heating device is provided for interrupting the transport of the cooling medium by heating up the cooling medium.
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