APPARATUS AND METHOD FOR REGULATING THE TEMPERATURE IN A PROCESS CHAMBER OF A CVD REACTOR USING TWO TEMPERATURE SENSOR DEVICES
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Nov 17, 2016
app pub date -
Dec 15, 2014
filing date -
Dec 15, 2014
priority date (Note) -
Published
status (Latency Note)
![]() |
A preliminary load of PAIR data current through [] has been loaded. Any more recent PAIR data will be loaded within twenty-four hours. |
PAIR data current through []
A preliminary load of cached data will be loaded soon.
Any more recent PAIR data will be loaded within twenty-four hours.
![]() |
Next PAIR Update Scheduled on [ ] |

Importance

US Family Size
|
Non-US Coverage
|
Abstract
An apparatus and a method for a thermal treatment, in particular a coating of a substrate, includes a heating device which is regulated by a regulating device which interacts with a first temperature sensor device. In order to counteract a temperature drift of the first temperature sensor device, a second temperature sensor device is used to detect the temperature drift and recalibrate the first temperature sensor device. The second temperature sensor device is used to measure the surface temperature of a substrate. This measured value is compared with a desired value, and if the desired value deviates from the measured actual value, a correction factor is formed and is used to apply the measured value used to regulate the heating device to the first temperature sensor device in order to bring the actual temperature value measured by the second temperature sensor device closer to the associated desired temperature value.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
AIXTRON SE | DORNKAULSTR 2 52134 HERZOGENRATH 52134 |
International Classification(s)

- 2014 Application Filing Year
- C23C Class
- 2649 Applications Filed
- 2034 Patents Issued To-Date
- 76.79 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Boyd, Adam | Kelmis, BE | 16 | 54 |
# of filed Patents : 16 Total Citations : 54 | |||
Lauffer, Peter Sebald | Aachen, DE | 8 | 9 |
# of filed Patents : 8 Total Citations : 9 | |||
Lindner, Johannes | Roetogen, DE | 16 | 463 |
# of filed Patents : 16 Total Citations : 463 | |||
Silva, Hugo | Aachen, DE | 7 | 386 |
# of filed Patents : 7 Total Citations : 386 | |||
Theres, Arne | Stolberg, DE | 1 | 3 |
# of filed Patents : 1 Total Citations : 3 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 3 Citation Count
- C23C Class
- 18.59 % this patent is cited more than
- 9 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 17, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
---|---|---|---|
Jan 09, 2012 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Dec 09, 2011 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Dec 09, 2011 |
Dec 09, 2011 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Jul 18, 2011 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Jun 05, 2007 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Dec 09, 2003 | I | Issuance | |
Feb 28, 2002 | F | Filing | |
Feb 28, 2002 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SCHUBERT, MANFRED;STARKE, PETER;REEL/FRAME:012648/0099;SIGNING DATES FROM 20010202 TO 20010203 Owner name: SMS DEMAG AG, GERMANY |
Jun 04, 1999 | PD | Priority Date |

Matter Detail

Renewals Detail
