APPARATUS AND METHOD FOR REGULATING THE TEMPERATURE IN A PROCESS CHAMBER OF A CVD REACTOR USING TWO TEMPERATURE SENSOR DEVICES

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United States of America Patent

APP PUB NO 20160333479A1
SERIAL NO

15105515

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus and a method for a thermal treatment, in particular a coating of a substrate, includes a heating device which is regulated by a regulating device which interacts with a first temperature sensor device. In order to counteract a temperature drift of the first temperature sensor device, a second temperature sensor device is used to detect the temperature drift and recalibrate the first temperature sensor device. The second temperature sensor device is used to measure the surface temperature of a substrate. This measured value is compared with a desired value, and if the desired value deviates from the measured actual value, a correction factor is formed and is used to apply the measured value used to regulate the heating device to the first temperature sensor device in order to bring the actual temperature value measured by the second temperature sensor device closer to the associated desired temperature value.

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Patent Owner(s)

Patent OwnerAddress
AIXTRON SEDORNKAULSTR 2 52134 HERZOGENRATH 52134

International Classification(s)

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  • 2014 Application Filing Year
  • C23C Class
  • 2649 Applications Filed
  • 2034 Patents Issued To-Date
  • 76.79 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2014201520162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boyd, Adam Kelmis, BE 16 54
Lauffer, Peter Sebald Aachen, DE 8 9
Lindner, Johannes Roetogen, DE 16 463
Silva, Hugo Aachen, DE 7 386
Theres, Arne Stolberg, DE 1 3

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  • 3 Citation Count
  • C23C Class
  • 18.59 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges27293913750251255742501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0501001502002503003504004505005506006507007508008509009501000

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