LIGHT IRRADIATION APPARATUS
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United States of America Patent
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Issued Date -
Nov 10, 2016
app pub date -
Nov 21, 2014
filing date -
Dec 25, 2013
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Abstract
A light irradiation apparatus that can uniformly treat the entire to-be-treated surface of a to-be-treated subject having a light irradiation apparatus including: a treatment chamber in which a to-be-treated subject is disposed; an ultraviolet emitting lamp for emitting vacuum ultraviolet rays to the to-be-treated subject; and gas supply means for supplying a treatment gas containing a source of active species to the treatment chamber. A gas supply port for supplying the treatment gas to the treatment chamber and a gas discharge port for discharging the gas in the treatment chamber are provided on respective sides of a to-be-treated subject placement area in the treatment chamber so as to form a gas flow channel through which the treatment gas flows from the gas supply port toward the gas discharge port in the treatment chamber. How much of a gas amount at the gas supply port reaches the gas discharge port is controlled to be 60 to 95%.
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