Different radiation measuring sensor and manufacturing method thereof
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United States of America Patent
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Apr 14, 2020
Grant Date -
Nov 10, 2016
app pub date -
May 6, 2016
filing date -
Dec 20, 2013
priority date (Note) -
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Abstract
Disclosed herein is a different radiation measuring sensor and a manufacturing method thereof. The different radiation measuring sensor includes a semiconductor substrate, at least one bottom electrode formed on a bottom surface of the semiconductor, a plurality of top electrodes formed on a top surface of the semiconductor and electrically connected to the bottom electrode, and sensing films formed on the plurality of top electrodes and reacting with different materials.
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